Falcon 300 Measuring System

Measurement Uncertainty
(X,Y)

Repeatable accuracy in X and Y axes, 4µm or better
- Uncertainty formula U₉₅2D = 3+(6L/1000)µm
where L = length in mm, using controlled conditions

Measurement Uncertainty
(Z)

Z-axis accuracy 10µm, using highest available magnification under controlled conditions

High resolution colour CCD camera with 5:1 ratio,
5-position indexed zoom and iris aperture control

Quadrant controllable surface illumination provided by 20 x high intensity LEDs (10,000+ hours)

Controllable substage illumination provided by 1 x high intensity LED (10,000+ hours)

150mm x 150mm x 115mm
- (15kg maximum load)

150mm x 100mm x 125mm
- (10kg maximum load)

Falcon with 150mm x 150mm stage
24.5kg

Falcon with 150mm x 100mm stage
19.0kg