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Application
Characteristics:
 Black,
highly light absorbent, low contrast
Measurement
Requirements:
 Measurement
of 3mm diameter blind bores
(required tolerance
of 5µm)
 Measurement
of 0.1mm bore depth
 Diameters;
radii; angular measurement
 Inspection
of surface detail
 Measurement
data recording and manipulation
Hawk
Configuration:
 Hawk
3-axis non-contact measurement system
 150
x 150mm high accuracy quick-release stage
 x2
and x10 objective lens magnification
(total magnification
x20 and x100 respectively)
 6-point
ring light and epi-illumination
(sub-stage illumination
standard)
 QC5000
Metrology Software
Specification
Details: (Hawk 3-osiowy system)

150mm x 150mm high accuracy stage provides stage accuracy better
than 5µm. x20 magnification used for diameter and radii measurement.
x100 magnification used for measuring 3mm blind bore giving high
magnification within the field of view and a depth of focus of 4µm.
4µm depth of focus allow for accurate measurement in the Z-axis.
Through the lens epi-illumination is used to illuminate the internal
bore, while substage illumination is used for profile measurement.
QC5000 3D Metrology Software provides all the required geometric
functions, including advanced statistical reporting functions.
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